R&D / pilot · Japan

IIM-1

Rapidus · Chitose, Hokkaido

Company: Rapidus
Facility role: Advanced logic R&D and manufacturing hub
Processes: 2 nm-class
Evidence as of: 2026-08-28

Evidence boundary

STATUS

R&D / pilot

Official Rapidus IIM-1 facility record. Facility-level capacity is not disclosed in the selected source

highRapidus IIM-1 official facility page ↗

EQUIPMENT

EUV lithography system · ASML

Count covers the specifically announced tool only.

reported-exact · 2026-08-28Rapidus EUV installation announcement ↗