VLSI KoreaTWINSCAN EXE:5200B
ASML · 1 publicly reported
Exact claim covers the announced High-NA system, not the fab's total EUV installed base or current facility status.
SK hynix High-NA EUV announcement ↗Operating · ASTRIA estimate · South Korea
Icheon M16
SK hynix · IcheonPublic facility record
- Facility type
- Memory
- Status
- Operating · ASTRIA estimate
- Location precision
- city-level
- Public role
- Memory semiconductor production or expansion site
- Site roles
- Memory manufacturing
- Products
- DRAM
- Processes
- Not disclosed in selected source
- Wafer sizes
- Not disclosed in selected source
- Public scale
- Facility-level capacity is not disclosed in the selected source
- Verified
- 2026-08-28
Public equipment disclosures
Public relationships
SK hynix M16 → ASML
One announced TWINSCAN EXE:5200B High-NA EUV system
SK hynix High-NA EUV announcement ↗ASTRIA lifecycle estimate · Disclosure
SK hynix announced assembly of a High-NA EUV system for mass-production use at M16.
An established production facility receiving a mass-production tool is treated as operating. This does not establish current utilization, tool qualification, wafer volume, or continued operation after the source date.
Facility-specific production-use evidence; qualitative lifecycle inference, not a probability estimate. · Estimated 2026-09-11
Source · 2025-09-03 ↗This record does not infer parcel coordinates, facility capacity, ownership, or undisclosed equipment totals.