R&D / pilot · Belgium

Leuven Research Infrastructure

imec · Leuven

Public facility record

Facility type: Research
Status: R&D / pilot
Location precision: campus
Public role: Semiconductor R&D and pilot infrastructure
Site roles: Semiconductor R&D · Pilot line
Products: Not disclosed in selected source
Processes: Not disclosed in selected source
Wafer sizes: 300 mm
Public scale: 300 mm research program publicly described
Verified: 2026-08-26

Public equipment disclosures

TWINSCAN EXE:5200

ASML · 1 publicly reported

This count covers the specifically announced High-NA tool, not every lithography system at imec.

imec advanced patterning infrastructure ↗

Public relationships

imec → ASML

Joint High-NA EUV lab and pilot-line program

imec advanced patterning infrastructure ↗

This record does not infer parcel coordinates, facility capacity, ownership, or undisclosed equipment totals.